产品品牌：

Tencor

产品型号：

Tencor 2908

Flexus 2908, Wafer Testing & Metrology

Manufacture: KLA-Tencor
Model#: Flexus 2908

Description:Wafer Testing & Metrology

Spesifications:Dual wavelength technology MS Windows based software

Temperatures: Up to 900C
Wafer size: 125mm-200mm
Power: 230v, 50/60Hz

Tool primarily used for calculation of biaxial modulus of elasticity and linear expansion

 

Water diffusion coefficient in dielectric films Linear regression and stress-temp or stress-time gradients

Description:  
900 deg C Thin Film Stress Measurement System. Provides accurate analysis of thin film stress with very low measurement noise. Allows observation and quantitative evaluation of stress relaxation, oxide densification, thin film phase transformations and annealing. Scan range user programmable up to 200mm. Wafer Sizes: 125, 150, 200mm. 230V, 1 Ph, 60 Hz, 30A.