脉冲激光沉积PLD太空模拟装置
价格:电议
地区:黑龙江 哈尔滨市
电 话:0451-51752136
手 机:13613627346
传 真:0451-51752136

我公司代理美国Torr公司,高质量PVD系统,产品系列包括热蒸发系统,

电子束蒸发系统E-beam,磁控溅射系统sputtering,反应离子刻蚀RIE, ICP

刻蚀机, 离子束刻蚀系统IBE,脉冲激光沉积系统PLD,等离子增强气相沉

积系统PECVD,除了标准的系统之外,我们还可以按照客户要求量身定制,

满足不同客户的苛刻要求。可提供电子束与热蒸发及磁控溅射联合系统,

完成多功能苛刻要求的应用。

COMPONENT

OPTIONS

Chamber

 

Choose Stainless Steel or Quartz, Cylindrical with Top Opening Lid or Box Shaped with Full Opening Front Door, Number, Size & Location of Viewports, Single or Multiple Chambers [Load Lock]

Gas Delivery

 

Choose Multiple Mass Flow Controllers, Gas Controllers, Custom Gas Showers, Independent N2 Venting Systems, Corrosive and|or Non-Corrosive Gasses, Lines & Valves

Electron Beam System

 

Choose Single or Multiple Pockets, Crucible Capacity, High Voltage Power Supply, XY Sweep Controller with Adjustable Variable Sweep Pattern

Magnetron Sputtering System

 

Choose Single or Multiple Guns, Gun Size, Adjustable,

Retractable or Fixed Mounting, RF and|or DC Power Supplies, Automatic or Manual Matching Network

Resistive Thermal System

Choose Single or Multiple Sources, Boats, Baskets & Coils, Independent Variable Power Supply

Ion Mill Source

Choose Beam Diameter, Power Source, Gas Delivery System

Etching System

Choose DC and|or RF Power Supplies, Gas Deliver System

Substrate Stage

Choose Stage Diameter, Stage Rotation and|or Tilt, Mask Holders, Stage Heating and|or Cooling

Thickness Sensors & Monitors

Choose Type of Thickness Sensor, Deposition Rate Controller, Manual or Automatic Process Control

Additional Options

 

Compact Table Top or Stand Alone Cabinet Systems, Manual or Automatic Controls, Individual Component Cooling Systems, Sheilds & Shutters, Chamber Liners, Renewable Extended Warranties and Much More!

If you are not sure exactly what options your system or your process requires, our staff will help you design the system that is right for your needs and that will fit your budget.