普通四探针方阻电阻率方法

发布时间:2019/6/4 8:53:00

 

规格型model

FT-331

FT-332

FT-333

FT-334

FT-335

FT-336

1.方块电阻范围Sheet resistance

10-5~2×105Ω/□

10-4~2×105Ω/□

10-3~2×105Ω/□

10-3~2×104Ω/□

10-2~2×105Ω/□

10-2~2×104Ω/□

2.电阻率范围Resistivity

10-6~2×106Ω-cm

10-5~2×106Ω-cm

10-4~2×106Ω-cm

10-4~2×105Ω-cm

10-3~2×106Ω-cm

10-3~2×105Ω-cm

测试电流范围

Test current

0.1μA ,1μA,10μA,100μA,1mA,10mA,100mA

10μA,100μA,1mA,10mA,100mA

0.1μA ,1μA,10μA,100μA,1mA,10mA,100mA

10μA,100μA,1mA,10mA,

100mA

0.1μA,1μA,10μA,100μA,1mA,10mA,100mA

1μA,10μA,100μA,1mA,10mA,100mA

4.电流 Current accura

±0.1%

±0.2%

±0.2%

±0.3%

±0.3%

±0.3%

5.电阻Resistance

≤0.3%

≤0.3%

≤0.3%

≤0.5%

≤0.5%

≤0.5%

参照标准:

1.硅片电阻率测量的国际标准(ASTM F84).

2.GB/T 1551-2009 《硅单晶电阻率测定方法》.

3.GB/T 1551-1995《硅、锗单晶电阻率测定直流两探针法》.

4.GB/T 1552-1995《硅、锗单晶电阻率测定直流四探针法》.