能谱仪EDS在微米或纳米尺度上对扫描电镜或透射电镜内通过电子碰撞所产生的X射线的能量进行测量来确定物质化学成分。 The INCA is based around the Navigator,which guides you through different tasks in a fast and logical way,while retaining the flexibility to allow you tomove around at will.SuperATW超薄窗口，10mm2活区。在MnKα处的分辨率：优于133eV。 能谱仪EDS分析元素范围：Be4-U92。SuperATW windows,10mm2 district.Resolution in MnKα:excellence than 133eV.
