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Unit 8160 Series Specifications-特点

Materials

Pre-Filter 1 to 2 μm

Gas Path SEMI F20 Compliant

Surface Finish 4 μ inch Ra

Seals Metal

Weight <2.65 lbs (1.2 kg)

Electrical

Current/Voltage (D/A) 160mA max @ +15 VDC and 200mA max @ –15 VDC

Power (D/A) 5.0 watts max

Current/Voltage (DNet) 600 mA @ 12 VDC and 300 mA @ 24 VDC

Power (DNet) 7.2 watts max

Certifications EMC 89/336 EEC

Performance    SC10-SC14  SC15-SC16   SC17-SC18

Settling Time：     ≤1 sec        ≤1 sec         ≤1 sec

Flow Range：      3–750 sccm    751–6000 sccm 6001–30000 sccm

Differential Pressure：7 to 45 psid    10 to 45 psid    15 to 45 psid

Accuracy (Model 8161, 8165)

2%              Valve Shut-off   Valve Shut-off   Valve Shut-off

2% to 5%         Not Specified    Not Specified   Not Specified

5% to 35%        ±0.35% F.S.      ±0.35% F.S.    ±0.35% F.S.

35% to 100%      ±1.0% S.P.      ±1.0% S.P.      ±1.0% S.P.

Accuracy (Model 8160) ±1.0% F.S.

Repeatability          ±0.15% F.S.

Linearity              ±0.5% F.S.

Ambient Temperature Coefficient

Zero                 0.005% F.S. per °C

Span                0.1% F.S. per °C

Leak Integrity        1x10–10atm-cc/sec (He)

Zero Drift            0.6% F.S. per year

Valve Leakby Rate    1% F.S.

Proof Pressure       500 psia max

Burst Pressure       1500 psia max

Valve Configuration   Normally Closed or Normally Open

Temperature Range   10°C–50°C

Warm Up Time       30 minutes

Mounting Position     HOV or HOS