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美国MKS 179A 全金属质量流量计
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大连瑞闻科技为您提供、高质量美国MKS179A型全金属质量流量计！

179A型全金属质量流量计主要具有以下显著优点：

1、是一款全金属的质量流量计（MFM），可在很多应用场合下测量、控制气体的流量.

2、有数字和模拟两种模式，其为全量程的1%和读数的1%.

3、有多种电器和机械配置，包括了边缘卡接口连接起，9针和15针D型接口.

4、满量程范围从10 sccm – 20 slm， 各种模拟和数字通讯口可供选择. 

可按照以下方法进行选型：

 

 



有关该设备的具体规格和选型请与我公司工程师联系，将为您提供完美的解决方案！

 

 

 

例：型号179A00411CR3A6MXX                                                                                  校准气体（SEMI气体编号）*                                                   采购序列号Helium, He                                                                       001Argon, Ar                                                                          004Hydrogen, H2                                                                    007Nitrogen, N2                                                                     013Oxygen, O2                                                                       015  校准流量SCCM－20000（相当氮气）                                          10                                                                                   11C 20                                                                                   21C                     50                                                                                   51C                     100                                                                                 12C                     200                                                                                 22C                     500                                                                                 52C                     1000                                                                               23C                     5000                                                                               14C                     20000                                                                             24C                      装配件（与以下兼容）标配：（兼容于）SwagelokR4VCRR凸接头                                 R                         选配：（兼容于）SwagelokR4VCOR凸接头                                G                         选配：（兼容于）SwagelokR0.25英寸管道                                  S                          阀门 无阀门                                                                              3                          连接器                                                                                                  模拟型    9针D型接口                                                                        A                         15针D型接口                                                                      B                         20针边缘卡接口                                                                   C                         15针D型变换接口（Brooks）                                                                       E                          数字型：RS-485                                                                            5                         DeviceNet                                                                        6                          密封金属                                                                                M