SPECIFICATIONS: |
|
Physical |
Excel 652UM |
Excel 651UC |
Measuring Volume |
600*650*250mm |
External Dimensions |
1311*1604*1788mm |
Weight |
1550kg |
Capacity |
100kg |
Stage |
Steel |
Base Mdterial |
Granite |
Ways |
Unique X&Y Monorail,Monorail Linear Z |
Motion Cortrol |
Servo:CNC,Moues,and Pendant Control |
Power Requirements |
93-264VAC,47-63Hz,10Amp max. |
Performance |
Excel 652UM |
Excel 651UC |
XY Accuracy |
Uxy=3.0+L/300µm |
Z Accuracy |
Uxy=3.0+L/150µm |
XY Repeat |
3.0µm |
Z Repeatability |
3.0µm |
X,Y Acceleration |
1000mm/s2 |
Z Acceleration |
500mm/s2 |
X,Y Speed |
150mm/s2 |
Scale Resolution |
0.1µm |
Features |
Excel 652UM |
Excel 651UC |
Video |
Hi-Res B&W |
Hi-Res Color |
lllumination Source |
Red LEDs |
White LEDs |
Lighting |
Surface,Profile,and Axial |
Optics/Magnification |
12*Opucal/2.5*Digltal Programmable Zoom/15x~1200x on Sreen |
Software |
InSpec for Windows Metrolongy Software(2000/XP/Vista) |
Environmental |
20℃(680F)±20,30-80% Humiditiy |
Warranty |
1Year Parts & Service | |