产品品牌：

MKS

产品型号：

M100B

M100B

弹性密封质量流量控制器（通用型）

M100B是一种通用的弹性密封的质量流量控制器，可在生产，分析，工业以及测试等多种应用场合测量和控制有腐蚀性气体的流量，特别是可重复性要求高的场合。配上合适的压力控制器，它还可以作为压力控制器使用。对于当今市场上的质量流量控制器，M100B可作为直接替代的产品，标准的3英寸底座使M100B能够直接进行安装而无需改变现有的气体管道。它具有模拟通讯模式，其为全量程的1%。 技术参数：全量程：10SCCM，20SCCM，50SCCM，100SCCM，200SCCM，500SCCM，1000SCCM，2000SCCM，        5000SCCM，10000SCCM，20000SCCM，30000SCCM，50000SCCM（可选）控制量程：2% to 100%的全量程。测量：全量程的1%灵敏度：全量程的0.1%热机时间：小于2Min.响应速度：小于2Sec.输入电压：±15VDC@100ma输出电压：0-5VDC连接器：模拟：9Pin或15Pin或20Pin Card edge.       数字：RS485或Device net或Profibus法兰接口：Swagelok 4VCR，Swagelok4 VCO，Swage 1/4”等材质：316不锈钢。质保期：有限保修自售出之日起18个月。 例：型号M100B00411CR1BV                                                    校准气体（SEMI气体编号）*                                   采购序列号Helium, He                                                         001Argon, Ar                                                           004Hydrogen, H2                                                      007Nitrogen, N2                                                      013Oxygen, O2                                                         015 校准流量SCCM（相当氮气50000）                                 10                                                                                                             11C                      20                                                                                                             21C                     50                                                                                                             51C                     100                                                                                                           12C                     200                                                                                                           22C                     500                                                                                                           52C                     1000                                                                                                         13C                     2000                                                                                                         23C                     5000                                                                                                         53C                     10000                                                                                                       14C                     20000                                                                                                       24C                     30000                                                                                                       34C                     50000**                                                        54C 装配件（Y）（与以下兼容）Swagelok^R4VCR^R凸接头                                                       R                         0.25英寸Swagelok^R                                                          S                                             Swagelok^R4VCO^R                                                                                                                                                                 G                         0.125英寸Swagelok***                                                                           P                         6 mm Swagelok^R                                                                                           M                         阀门（1）常闭（控制器）                                                                                        1                          连接器（W）                                                                                       15针D型接口                                                                                          B                           型号M100B（续）   密封（Z）****Buna N                                                                                                     B                         Neoprene^R                                                                                                N                         Viton^R                                                                                                      V                          用于M100B的电缆线CB147-1-10用来将M100B 15针D型接口连接至PR4000, 146, 186, 167, 647CB259-5-10用来将M100B 15针D型接口连接至246, 247