产品品牌：

MKS

产品型号：

901P-21

产品用途：

真空测量

MICROPIRANI™ / PIEZO LOADLOCK TRANSDUCER

 

Sensor Type 1   MicroPirani™ (MEMS Thermal Conductivity)
Sensor Type 2   Piezo differential (MEMS diaphragm)

 

MicroPirani Accuracy(1)

 

5 X 10-4 to 1 X 10-3 Torr ±10% of reading
1 X 10-3 to 100 Torr ±5% of reading
100 Torr to Atm ±25% of reading

Repeatability(1)

1 X 10-3 to 100 Torr ±2% of reading
 

Transducer Model：901P Loadlock

Flange：KF25

Interface：RS232 / Analog