【各项技术参数】  
Model                     M3500V                     M3500A
流量范围(N2)        300slpm ~ 1000slpm         300slpm ~ 1000slpm
响应时间                  <2 sec                      <2 sec
精准度                    ≤±1% FS                   ≤±1% FS
重复                ±0.25% FS                    ±0.25% FS
输入/输出信号             0~5 Vdc                 0~5 Vdc OR 4~20 mA
供电电源         ±15 Vdc or 24 Vdc, 350mA     ±15 Vdc or 24 Vdc, 350mA
耐压                      <15 bar                      <15 bar
工作环境温度              0~50 °C                     0~50 °C
漏率                  1*10E-9 atm cc/sec           1*10E-9 atm cc/sec
使用范围                2 ~ 100% for                   2 ~ 100%