SPECIFICATIONS: | | Physical | Excel 652UM | Excel 651UC | Measuring Volume | 600*650*250mm | External Dimensions | 1311*1604*1788mm | Weight | 1550kg | Capacity | 100kg | Stage | Steel | Base Mdterial | Granite | Ways | Unique X&Y Monorail,Monorail Linear Z | Motion Cortrol | Servo:CNC,Moues,and Pendant Control | Power Requirements | 93-264VAC,47-63Hz,10Amp max. | Performance | Excel 652UM | Excel 651UC | XY Accuracy | Uxy=3.0+L/300µm | Z Accuracy | Uxy=3.0+L/150µm | XY Repeat | 3.0µm | Z Repeatability | 3.0µm | X,Y Acceleration | 1000mm/s2 | Z Acceleration | 500mm/s2 | X,Y Speed | 150mm/s2 | Scale Resolution | 0.1µm | Features | Excel 652UM | Excel 651UC | Video | Hi-Res B&W | Hi-Res Color | lllumination Source | Red LEDs | White LEDs | Lighting | Surface,Profile,and Axial | Optics/Magnification | 12*Opucal/2.5*Digltal Programmable Zoom/15x~1200x on Sreen | Software | InSpec for Windows Metrolongy Software(2000/XP/Vista) | Environmental | 20℃(680F)±20,30-80% Humiditiy | Warranty | 1Year Parts & Service |
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