被测件长度 Max. measured length | 150 mm |
工作台行程 Lifting range of worktable | 5 mm |
测杆移动范围 | 0.5mm |
分划板刻度范围 | ±50格 |
直接测量范围 Measuring range | 5-20μm |
分度值调整范围 Adjusting range of grad | 0.05-0.2 μm |
推荐使用分度值Recommended grad | 0.1 μm |
测量压力 Measuring force | (1.5±0.1) N |
仪器示值稳定性 Indication reliability | 0.02 μm |
仪器误差 Indication error | 数字显示 Digital display |
测量误差 M ax.measurement error | | | | n 是格数, i是格值,λ是滤光片中心波长,△λ是滤光片波长误差 n is number of divisions, i is division value △λ is error of wavelength |
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仪器体积Dimensions
| 280×500×700 mm |
仪器重量Weight | 40 kg |
标准配件 Standard attachments | | 五筋园台Five-Rib circular stage 九筋玛瑙台Agate stage 可调园平台Adjustable planar stage 辅助台Auxiliary stage, fixed 平面测帽Planar contact tip, Ф2 小球面测帽Small spherical contact tip 干涉滤光片 Wavelength filter | |
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